Semicon Etching Agents
DAIKIN provides high quaity etching agents for wet and dry fluorine types for semiconductor manufacturing.
DESCRIPTION
Daikin's fluorochemical products contribute to improving the quality of the semiconductors which will shape our future, and they challenge us to anticipate the future needs of customers. We meet the need for cleanliness and high purity in advanced areas with such products as etching agents.
GRADES & FEATURES
Dry Etching Agent
Grades | Features | DOWNLOADS |
---|---|---|
PFC-14 (CF4) | High-Purity (More than 99.999 %) | TECHNICAL DATA SHEET SAFETY DATA SHEET |
PFC-116 (C2F6) | TECHNICAL DATA SHEET SAFETY DATA SHEET | |
PFC-C318 (C4F8) | TECHNICAL DATA SHEET SAFETY DATA SHEET | |
HFC-23 (CHF3) | TECHNICAL DATA SHEET SAFETY DATA SHEET | |
HFC-32 (CH2F2) | TECHNICAL DATA SHEET SAFETY DATA SHEET |